Edwards STP-iXA3306C磁懸浮分子泵
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產(chǎn)品名稱: Edwards STP-iXA3306C磁懸浮分子泵
產(chǎn)品型號(hào): YT820Z040
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無相關(guān)文檔
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Edwards STP-iXA3306C磁懸浮分子泵
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Edwards STP-iXA3306C Turbomolecular Vacuum Pump - NEW
The STP-iXA3306 series magnetically levitated turbomolecular pump provides industry-leading performance and incorporates a small power supply into the onboard control unit – the latest technology of the well-established STPiXA3305 series.
The height of the pump is equal to the STP-XA2703/XA3203 and is also equal to the height of the STP-iXA3305 series without its power supply (iPS-1200). This fully integrated product offers easy installation and a small footprint as an all-in-one solution for all application tools.
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Compact design including a fully integrated controller
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Innovative, self-sensing magnetic bearing system
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Digital 5-axis control
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Vibration levels reduced by 50% compared to the existing turbo pumps
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Can be configured to run corrosive processes
Inlet flange sizeISO250F / VG250 / ICF305ISO320F / VG300 / ICF356Backing port sizeKF40K40Pumping speed N22,650 l/s3,200 l/sPumping speed Ar2,300 l/s2,800 l/sWeight80 kg83 kgCompression ratio N2/H2> 108 / 2 x 103Ultimate pressure10-7 Pa (10-9 Torr)Allowable backing pressure266 Pa (2 Torr)Max gas flow N2 *(water cooled only)4,000 sccm (6.76 Pam3s-1)Max gas flow Ar * (water cooled only)2,100 sccm (3.55 Pam3s-1)Rated speed27,700 rpmStarting time< 10 minutesMounting positionAny orientationInput voltage200-240 VMax input power without TMS1,500 VAMax input power with TMS
1,800 VA
Edwards STP-iXA3306C Turbomolecular Vacuum Pump - NEW
P/N YT82-0Z-020 / YT820Z020 STP-iXA3306C ISO-250F
P/N YT82-0Z-030 / YT820Z030 STP-iXA3306C VG-250
P/N YT82-0Z-040 / YT820Z040 STP-iXA3306C ISO-320F
YT82-0Z-050 / YT820Z050 STP-iXA3306C VG-300
YT82-0Z-060 / YT820Z060 STP-iXA3306C ISO-250F Profibus
YT82-0Z-070 / YT820Z070 STP-iXA3306C ISO-320F Profibus
